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XEIC

In-line System Equipment I/F Controller

Summary

  SECS/GEM communication through standardized interface integration

  Supports SEMI E4, E5, E30, E37

  Configured Up to 10 In-Line instruments

Overview

XEIC is a convenient solution to integrate and manage various devices with XGemPRO into one in-line system.
It works with the XGemPRO interface, so you can implement the in-line system with a simple setup.
Up to 10 instruments can be configured within the In-line system, and it supports SEMI standard E4, E5, E37, and E30 specifications.



Key Features and Functions

1) SECS/GEM service support

  • Supports collection of equipment data, event reporting, and alarm reporting
  • Supports designated module RCMD, RECIPE transmission


2) Supports multiple equipment interworking as an In-Line system

  • Configured Up to 10 In-Line instruments


3) Supports interworking with PLC-based equipment

  • Supports Mitsubishi models
  • LS Prenatal, OMRON, etc. are planned to be supported


4) Supports data transmission and reception function between configured equipment



5) Supports Config Tool

  • Supports GEM information registration by equipment
  • Supports the parameter settings associated with a communication
  • Support mapping function between PLC and GEM information

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