The XComPRO SECS driver is a communication driver that makes SECS, a standard communication
protocol between semiconductor
and flat display equipment, easier and easier to use.
The XGemPRO GEM driver is a driver for GEM
communication that makes GEM communication/control of semiconductor
equipment easier and easier to respond to and supports SEMI E30 specification.
XGem300PRO includes XGemPRO natively, with additional support for scenarios,
used in the 300mm line, supporting specifications of E30, E40, E87, E90, E94 and E116.
XGemEX supports scenarios used in the 300mm line and supports automatic
connectivity and EDA information updates with the EDA product CIMPortal Plus.
It is a convenient solution for implementing an inline system with a simple setup and integrating and managing various equipment with XGemPRO into one inline system.
It is an H/W integrated solution that integrates additional equipment/sensor information into existing GEM communication without software changes in semiconductor facilities.
This product is suitable for deploying GEM communication services on PLC-based equipment,
and the GEM communication service can be easily deployed simply by setting up data through the Configuration Tool.