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XGem300 is a product with 300 specifications (E87, E94, E90, E40) added to the XGem specification.

E40, E87, E90, E94 specifications are as follows.


SEMI E40: STANDARD FOR PROCESSING MANAGEMENT

-Ensure that the appropriate processing (recipe) is applied to the material delivered to the equipment (using S16 series messages). )


SEMI E87: SPECIFICATIONS FOR CARRIER MANAGEMENT

- Define data services to automate Carrier Transfer. (Use S3 series message.)


SEMI E90: SPECIFICATION FOR SUBSTRATE TRACKING

- Service to manage the substrate produced by the equipment.


SEMI E94: SPECIFICATION FOR CONTROL JOB MANAGEMENT

-Defines ProcessJobs to process one or more materials. Object (using S14 series messages)