Difference between XGem and XGem300
XGem300 is a product with 300 specifications (E87, E94, E90, E40) added to the XGem specification.
E40, E87, E90, E94 specifications are as follows.
SEMI E40: STANDARD FOR PROCESSING MANAGEMENT
-Ensure that the appropriate processing (recipe) is applied to the material delivered to the equipment (using S16 series messages). )
SEMI E87: SPECIFICATIONS FOR CARRIER MANAGEMENT
- Define data services to automate Carrier Transfer. (Use S3 series message.)
SEMI E90: SPECIFICATION FOR SUBSTRATE TRACKING
- Service to manage the substrate produced by the equipment.
SEMI E94: SPECIFICATION FOR CONTROL JOB MANAGEMENT
-Defines ProcessJobs to process one or more materials. Object (using S14 series messages)