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Smart FactorySupportFAQ

What is Gem300?

XGem300 is a product with 300 specifications (E87, E94, E90, E40) added to the XGem specification.

E40, E87, E90, E94 specifications are as follows. n1. SEMI E40: STANDARD FOR PROCESSING MANAGEMENT
 Make sure that the appropriate processing (recipe) is applied to the material delivered to the equipment (using S16 series messages).
2. SEMI E87: SPECIFICATIONS FOR CARRIER MANAGEMENT Defines data services to automate Carrier Transfer. (Use S3 series messages.)
3. SEMI E90: SPECIFICATION FOR SUBSTRATE TRACKING
 Services for managing substrates produced on equipment. (Using S14 series messages, such as tracking location)
4. SEMI E94: SPECIFICATION FOR CONTROL JOB MANAGEMENT
 An Object that defines ProcessJobs for processing one or more materials (using S14 series messages)

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