Meaning of primary and secondary message and no reply message
In the SEMI standard, Primary Message is defined as an odd function value, and
Secondary Message is defined to have an even value greater than 1 greater than that of the Primary Message function.
Example) S1F1 Secondary Message
In XCom, a message with an even function value can be considered as a secondary message.
No reply message is a primary message but does not require a
reply message after the message is sent. .
In the SML file, set the Primary message to P Se, the Condary message to S and the No reply message to N.